Superconducting quantum circuits are one of the leading quantum computing platforms. To advance superconducting quantum computing to a point of practical importance, it is critical to identify and address material imperfections that lead to decoherence. In this talk, I will show how terahertz Scanning Near-field Optical Microscopy (SNOM) can be used to probe functional devices such as coplanar microwave resonators and inform the processing of new materials for quantum technology.
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