Joshua J. Thornes
Director of Marketing at ASML
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 11 November 2022 Presentation
Siqi Luo, Will Conley, James Bonefede, Natallia Karlitskaya, Thomas Yang, david manley, peter Oh, Rajasekhar Rao, marc sells, Josh thornes
Proceedings Volume PC12293, PC122930H (2022) https://doi.org/10.1117/12.2648306
KEYWORDS: Yield improvement, Speckle, Light sources, Helium

Proceedings Article | 25 March 2020 Presentation
Proceedings Volume 11327, 113270P (2020) https://doi.org/10.1117/12.2552505

Proceedings Article | 20 March 2018 Presentation
Theodore Cacouris, Josh Thornes, Marc Sells, Aleks Simic, Will Conley
Proceedings Volume 10587, 105870Y (2018) https://doi.org/10.1117/12.2298431
KEYWORDS: Light sources, Logic, Deep ultraviolet, Optical lithography, Immersion lithography, 3D metrology, Photomasks

Proceedings Article | 15 March 2016 Paper
Dinesh Kanawade, Yzzer Roman, Ted Cacouris, Josh Thornes, Kevin O'Brien
Proceedings Volume 9780, 97801H (2016) https://doi.org/10.1117/12.2219942
KEYWORDS: Neon, Light sources, Excimer lasers, Chemical elements, Lithography, Excimers, Deep ultraviolet, Semiconductors, Halogens, Fluorine, Molybdenum

Proceedings Article | 18 March 2015 Paper
Joshua Thornes, Kevin O'Brien, Hoang Dao, David Dunlap, Ronnie Flores, Matt Lake, Aleks Simic, Brian Wehrung, John Wyman, Will Conley
Proceedings Volume 9426, 942625 (2015) https://doi.org/10.1117/12.2086102
KEYWORDS: Semiconducting wafers, Light sources, Control systems, Lithography, Yield improvement, Manufacturing, Scanners, Cadmium sulfide, Optical lithography, Overlay metrology

Showing 5 of 12 publications
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