Dr. Joo Sung Lee Profile

Dr. Joo Sung Lee

at Rohm and Haas Electronic Materials Korea Ltd

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Publications (1)

Proceedings Article | 25 May 2022 Presentation + Paper

Thickness dependence of properties of EUV underlayer thin films

Jae Hwan Sim, Yoo-Jin Ghang, Jung-June Lee, Jae Yun Ahn, Jae-Bong Lim, Joo Sung Lee, Min Young Jeong, Soojung Leem, Youngeun Bae, Yinjie Cen, James Marsh, Lei Zhang

Proceedings Volume 12055, 120550B (2022) https://doi.org/10.1117/12.2613437

KEYWORDS: Thin films, Extreme ultraviolet, Polymers, Extreme ultraviolet lithography, Semiconducting wafers, Polymer thin films, Chemical analysis, Silicon

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