Dr. Jonathan R. Thompson
at Air Force Research Lab.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 May 2022 Presentation + Paper
Proceedings Volume 12103, 121030A (2022) https://doi.org/10.1117/12.2618630
KEYWORDS: Mirrors, Semiconducting wafers, Deep ultraviolet, Transmittance, Crystals, Photoresist materials, Lithography, Fabrication, Machine learning, FT-IR spectroscopy

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