We report on the efficient use of high-energy, multi-millijoule ultrafast laser sources to operate well-known low-energy micro-machining applications such as surface texturing of transparent materials. A sophisticated optical system that employs micro-lens arrays is used enabling flexible beam splitting and thus parallel processing. Here, the number of foci can be varied ranging from a few ten up to a few hundred spots. As selected examples we will present efficient glass surface texturing using 8mJ and 200W of an industry grade ultrafast laser platform. Our micro-lens-array-based optical head is generating high-quality dimples on a (100 x 100)mm2 with filling factors above 25% area in less than 15s.
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