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Jon Christopher Case
at Affiliated Engineers Inc
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 18 August 2005 Paper
Contamination sources and means of mitigation: a focus on particulate contamination, airborne molecular contamination and biological contamination.
Proceedings Volume 5933, 593309 (2005) https://doi.org/10.1117/12.617818
KEYWORDS: Particles, Contamination, Atmospheric particles, Carbon, Semiconductors, Optical filters, Systems modeling, Performance modeling, Manufacturing, Phase modulation
Conference Committee Involvement (1)
Buildings for Nanoscale Research and Beyond
31 July 2005 | San Diego, California, United States
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