Prof. Jinlong Zhu Profile

Prof. Jinlong Zhu

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Proceedings Article | 14 August 2024 Paper

3D topography and roughness measurement of the inner surface of semi-closed parts

Xiangyu Zhao, Jinlong Zhu

Proceedings Volume 13248, 1324803 (2024) https://doi.org/10.1117/12.3032321

KEYWORDS: 3D metrology, Interferometry, Phase shifts, Manufacturing, Engineering, Sensors, Material fatigue, Design

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Semi-enclosed parts have a wide range of applications in precision manufacturing, aerospace, and reverse design. Understanding and characterizing the 3D topography and roughness of the internal surfaces of semi-enclosed parts is critical to ensure part performance, assembly quality, sealing effectiveness, friction characteristics, vibration behavior, and wear durability. However, some semi-enclosed parts are small and have complex internal structures, and conventional measurement methods are not effective in accurately measuring the 3D topography and roughness of the internal surfaces of semi-enclosed parts. Therefore, we propose a microdevice-based interferometry system, which adds micrometer-scale devices such as microsteering devices to the interferometric structure, for measuring 3D topography and roughness of the inner surface of semi-closed parts. Experiments have demonstrated that our proposed measurement system has excellent measurement accuracy down to the nanometer level. By providing accurate surface 3D topography and roughness data, this technique opens up new possibilities for future engineering design and manufacturing and is expected to advance the development of advanced manufacturing technologies.

Proceedings Article | 30 April 2024 Paper

Miniature interferometry systems

Xiangyu Zhao, Jinlong Zhu

Proceedings Volume 13155, 131550Y (2024) https://doi.org/10.1117/12.3018559

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This thesis presents a miniature interferometric system designed to realize high-precision non-contact measurements of micro- and nanostructures on samples to be tested. Traditional interferometric systems mainly use vertical scanning interferometry, which is usually limited to the measurement of small samples in laboratory scenarios. In order to meet diversified measurement needs, we have developed a compact, small and portable micro interferometry system, which consists of modules such as a light source and illumination system, an imaging system, a PZT displacement system, and a micro-reflector stylus. With this system, the vertical measurement space can be reduced to less than 1mm. We also employ algorithms such as multi-step phase shift and envelope curve fitting to achieve high precision measurements with an error of less than 1%.

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