Ultra-precision turning technology is widely used in the machining process of optical mirrors. Due to the influence of machine motion error, clamping error, tracking error and other factors, ultra-precision turning often deviates from the ideal position during the actual machining process. Various error factors are coupled with each other, and it is difficult to compensate by establishing an accurate error model at present. This paper proposes an optical surface error compensation method based on zernike polynomials. Firstly, the surface error is reconstructed with Zernike polynomials. Then, by analyzing the frequency distribution of the optical surface error, the error corresponding to a specific Zenick coefficient is selected. Finally, based on the fast tool servo system, the original machining path is corrected according to the error compensation strategy. By compensating a Φ100 mm mirror, the surface accuracy is improved from PV 1.83 μm, RMS 0.47 μm to PV 0.38 μm, RMS 0.04 μm. The experimental results show that the error compensation strategy proposed in this paper can significantly reduce the optical surface error and improve the machining accuracy.
With the application of single point diamond ultra-precision turning technology in optical free-form surface processing, the development of high-frequency large amplitude fast tool servo system has become a research hotspot. In this paper, a double piezoelectric ceramic fast tool servo system is designed. Its performance index is 60μm stroke at 300Hz. In this paper, the structural design principle and processing technology of the system are systematically analyzed. The stiffness analysis of the system were carried out by using the finite element analysis software to verify the performance of the high-frequency response amplitude of the system. In this paper, the key technology research on the structure design of double piezoelectric ceramic fast tool servo system provides the basis for improving the machining accuracy and efficiency of the fast tool servo system.
Complex surface optical components have been widely used in the forefront of aerospace, space exploration, military reconnaissance and modern information technology due to their advantages in improving aberrations, improving imaging quality, reducing system unit quantity and weight, reducing power loss, improving accuracy and stability. As one of the main methods to process high precision optical component, Computer controlled optical surfacing (CCOS) has also been applied in the processing of complex surfaces. However, due to the incompletely contact between the polishing pad and the surface of the workpiece especially the high-steepness and large curvature area during processing, the phenomenon of unstable removal function is generated, which leads to deterioration of surface accuracy and even flaws..In this paper, the elastic fiber modeling theory derivation, ABAQUS finite element simulation and experimental verification method are used to study the contact problem between the polishing disc and the workpiece surface and the stress distribution when processing complex curved surfaces, and the deformation layer of the polishing pad is optimized. An improved semiflexible polishing disc was used to machine a complex curved aluminum alloy mirror, which improved the surface quality while controlling the change in surface accuracy (PV value) within 10%, verifying the improved polishing disc processing. The effectiveness of complex surfaces.
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