Total internal reflection imaging ellipsometry (TIRIE) is widely used in the field of the biological detection due to its high sensitivity and multi-detection capability. Traditionally, the ellipsometric measurement works under the null-off null condition which is insensitive to the small interface variations such as the electron density disturbance at the sensing surface. Thus, we analyze the response of the detected signals under the different working conditions to the ellipsometric parameter variations and optimize the polarization settings to further enhance the TIRIE response to the subtle interface variation in this paper. Furthermore, the relationship between the detected signal and the electron density disturbance is obtained, and the result shows that the detection sensitivity for the subtle interface changes is improved by one hundred times under the optimized working condition.
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