Jia-Syun Cai
at National Taiwan Univ
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12954, 129540C (2024) https://doi.org/10.1117/12.3012028
KEYWORDS: Transistors, Lithography, Optical proximity correction, Semiconducting wafers, Device simulation, Design rules, Field effect transistors, Extreme ultraviolet lithography

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12495, 1249512 (2023) https://doi.org/10.1117/12.2658706
KEYWORDS: Transistors, Standards development

SPIE Journal Paper | 10 July 2021
JM3, Vol. 20, Issue 03, 033401, (July 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.3.033401
KEYWORDS: TCAD, Transistors, Device simulation, 3D modeling, Integrated circuits, Instrument modeling, Lithography, Error analysis, Logic, Doping

SPIE Journal Paper | 27 April 2021
Chien-Lin Lee, Jia-Syun Cai, Sheng-Wei Chien, Kuen-Yu Tsai, Jia-Han Li, Chao-Te Lee
JM3, Vol. 20, Issue 02, 023001, (April 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.2.023001
KEYWORDS: Optical lithography, Palladium, Helium, Ion beams, Direct write lithography, Metrology, Extreme ultraviolet lithography, Lithography, Silicon, Glasses

Proceedings Article | 1 October 2019 Paper
Proceedings Volume 11147, 111471J (2019) https://doi.org/10.1117/12.2536874
KEYWORDS: Metrology, Optical lithography, Helium, Extreme ultraviolet lithography, Lithography, Ion beam lithography

Showing 5 of 7 publications
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