Mr. James A. Carroll Profile

James A. Carroll

President at Photomask Portal

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 23 April 1999 Paper

Wen Chen, James Carroll, Glenn Storm, Ronald Ivancich, John Maloney, Olivier Maurin, Eric Souleillet

Proceedings Volume 3665, (1999) https://doi.org/10.1117/12.346214

KEYWORDS: Reticles, Pellicles, Distortion, Photomasks, Adhesives, Image registration, Overlay metrology, Metrology, Lithography, Semiconductors

Proceedings Article | 18 December 1998 Paper

Wen Chen, James Carroll, Glenn Storm, Ronald Ivancich, John Maloney, Olivier Maurin, Eric Souleillet

Proceedings Volume 3546, (1998) https://doi.org/10.1117/12.332822

KEYWORDS: Reticles, Pellicles, Distortion, Photomasks, Image registration, Adhesives, Overlay metrology, Metrology, Lithography, Semiconductors

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