Dr. Jaehwang Jung Profile

Dr. Jaehwang Jung

Staff Engineer at SAMSUNG Electronics Co., Ltd.

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 15 August 2023 Presentation + Paper

Improving the accuracy and precision of OCD measurement by systematic error correction in self-interference pupil ellipsometry

Seungwoo Lee, Yeeun Park, Seungryeol Lee, Hoonchul Chang, Jaehwang Jung, Inho Shin, Seoyeon Jeong, Sooyeong Lee, Jinwoo Ahn, Taejoong Kim, Taeyong Jo, Myungjun Lee

Proceedings Volume 12618, 126180B (2023) https://doi.org/10.1117/12.2677195

KEYWORDS: Objectives, Beam splitters, Polarization, Temperature metrology, Ellipsometry, Error analysis, Optical components

Read Abstract +

Proceedings Article | 27 April 2023 Presentation + Paper

Mueller matrix metrology with multi-angle information using multiple self-interference

Garam Choi, Jinyong Kim, Daehoon Han, Young-Uk Jin, Soonhong Hwang, Jinseob Kim, Wookrae Kim, Jaehwang Jung, Seungwoo Lee, Taejoong Kim, Jinwoo Ahn, Myungjun Lee, Gideok Kim, Su-Young Lee, Yusin Yang

Proceedings Volume 12496, 1249610 (2023) https://doi.org/10.1117/12.2657852

KEYWORDS: Mueller matrices, Line edge roughness, Polarization, Metrology, Simulations, Critical dimension metrology, Holograms, Ellipsometry, Holography

Read Abstract +

Proceedings Article | 13 June 2022 Presentation

Interferometric ellipsometry for massive angular spectra to overcome sensitivity limitation in device metrology

Jaehwang Jung, Jinseob Kim, Jinyong Kim, Seungwoo Lee, Seoyeon Jeong, Inho Shin, Wookrae Kim, Changhoon Choi, Myungjun Lee

Proceedings Volume 12053, 120530R (2022) https://doi.org/10.1117/12.2607442

KEYWORDS: Ellipsometry, Metrology, Interferometry, Semiconducting wafers, Wafer-level optics, Spectroscopic ellipsometry, Silica, Optical metrology, Microscopy, Mathematical modeling

Read Abstract +

Proceedings Article | 26 May 2022 Presentation + Paper

Sensitivity and repeatability performance on overlay and CD measurement by incorporating hologram based ellipsometry

Yasuhiro Hidaka, Jinyong Kim, Jaehwang Jung, Mitsunori Numata, Wookrae Kim, Shinji Ueyama, Myungjun Lee

Proceedings Volume 12053, 1205311 (2022) https://doi.org/10.1117/12.2614734

KEYWORDS: Holograms, Ellipsometry, Overlay metrology, Polarization, Critical dimension metrology, Metrology, Image sensors, Reflectivity, Objectives, Semiconducting wafers

Read Abstract +

Proceedings Article | 1 August 2021 Presentation + Paper

A new approach in optical metrology with multi-angle information through self-interferometric ellipsometry

Wookrae Kim, Jaehwang Jung, Jinseob Kim, Inho Shin, Namyoon Kim, Myungjun Lee

Proceedings Volume 11817, 1181707 (2021) https://doi.org/10.1117/12.2593375

KEYWORDS: Ellipsometry, Metrology, Semiconducting wafers, Reconstruction algorithms, Semiconductors, Polarization, Objectives, Image sensors, Optical metrology, Linear polarizers

Read Abstract +

Proceedings Article | 15 March 2021 Presentation + Paper

A breakthrough on throughput and accuracy limitation in ellipsometry using self-interference holographic analysis

Jaehwang Jung, Yasuhiro Hidaka, Jinseob Kim, Mitsunori Numata, Wookrae Kim, Shinji Ueyama, Myungjun Lee

Proceedings Volume 11611, 116111J (2021) https://doi.org/10.1117/12.2581555

Read Abstract +

Proceedings Article | 11 March 2020 Presentation

Lens-free through-focus super resolution holographic microscopy with novel phase retrieval algorithm (Conference Presentation)

Kyungwon Yun, Jaehyeon Son, Taewan Kim, Seung Beom Park, Jaehwang Jung, Daejun Park, Doyoung Kim, Myungjun Lee

Proceedings Volume 11249, 112490M (2020) https://doi.org/10.1117/12.2551033

KEYWORDS: Super resolution, Holography, Phase retrieval, Imaging systems, Microscopy, Image resolution, Reconstruction algorithms, Biomedical optics, Inspection, Diffraction

Read Abstract +

Proceedings Article | 9 March 2020 Presentation

Super-resolution reflection-mode holographic microscope for 3d imaging of semiconductor devices without optical lens (Conference Presentation)

Jaehyeon Son, Seung Beom Park, Kyungwon Yun, Taewan Kim, Jaehwang Jung, Myungjun Lee

Proceedings Volume 11245, 1124506 (2020) https://doi.org/10.1117/12.2551036

KEYWORDS: Holography, Microscopy, Super resolution, Image resolution, Microscopes, Semiconductors, Stereoscopy, Optical semiconductors, Imaging devices, Wafer-level optics

Read Abstract +

Proceedings Article | 24 April 2017 Presentation

Quantifying structural alterations in Alzheimer's disease brains using quantitative phase imaging (Conference Presentation)

Moosung Lee, Eeksung Lee, JaeHwang Jung, Hyeonseung Yu, Kyoohyun Kim, Jonghee Yoon, Shinhwa Lee, Yong Jeong, YongKeun Park

Proceedings Volume 10074, 100741A (2017) https://doi.org/10.1117/12.2251560

KEYWORDS: Neuroscience, Magnetic resonance imaging, Positron emission tomography, Tissues, Brain, Neuroimaging, Alzheimer's disease, Pulsed laser operation, Image resolution, Phase imaging

Read Abstract +

Showing 5 of 9 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years