Dr. Jacqueline Vollmann Profile

Dr. Jacqueline Vollmann

at ETH Zürich

SPIE Involvement:

Author

Publications (10)

Proceedings Article | 20 March 2008 Paper

Sub-wavelength optical diffraction and photoacoustic metrologies for the characterisation of nanoimprinted structures

T. Kehoe, J. Bryner, V. Reboud, N. Kehagias, S. Landis, C. Gourgon, J. Vollmann, J. Dual, C. Sotomayor Torres

Proceedings Volume 6921, 69210F (2008) https://doi.org/10.1117/12.772545

KEYWORDS: Diffraction, Diffraction gratings, Polymers, Photoacoustic spectroscopy, Silicon, Nanoimprint lithography, Polymethylmethacrylate, Metrology, Aluminum, Semiconducting wafers

Read Abstract +

Proceedings Article | 18 June 2007 Paper

Simulation of the elastic wave propagation in anisotropic microstructures

Juerg Bryner, Jacqueline Vollmann, Dieter Profunser, Jurg Dual

Proceedings Volume 6616, 661637 (2007) https://doi.org/10.1117/12.726132

KEYWORDS: Wave propagation, Silicon, Inspection, Acoustics, Thin films, Polymethylmethacrylate, Picosecond phenomena, Nondestructive evaluation, Microelectromechanical systems, Optical testing

Read Abstract +

Proceedings Article | 18 June 2007 Paper

Validation of an algorithm for wave propagations in graded materials with an analytical solution

L. Aebi, K. Löffel, J. Vollmann, J. Dual

Proceedings Volume 6616, 66163F (2007) https://doi.org/10.1117/12.726162

KEYWORDS: Wave propagation, Analytical research, Interfaces, Acoustics, Finite-difference time-domain method, Numerical analysis, Optical filters, Nanostructures, Spectrum analysis, Quantitative analysis

Read Abstract +

Proceedings Article | 13 June 2005 Paper

Laser acoustic characterization of Ta and TaN diffusion barriers beneath Cu layers

Jacqueline Vollmann, Dieter Profunser, Jurg Bryner, Jurg Dual

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612559

KEYWORDS: Acoustics, Tantalum, Copper, Diffusion, Reflectivity, Photoacoustic spectroscopy, Transmission electron microscopy, Interfaces, Scanning electron microscopy, Absorption

Read Abstract +

Proceedings Article | 21 July 2004 Paper

Mechanical wave propagation at phase and material interfaces of microstructures

Jacqueline Vollmann, Dieter Profunser, Jozefien Goossens, Juerg Dual

Proceedings Volume 5392, (2004) https://doi.org/10.1117/12.543789

KEYWORDS: Acoustics, Aluminum, Interfaces, Gold, Picosecond phenomena, Wave propagation, Diffusion, Reflectivity, Profiling, Thin films

Read Abstract +

Proceedings Article | 3 October 2003 Paper

Mechanical characterization of thin membranes with picosecond ultrasound

Dieter Profunser, Jacqueline Vollmann, Jurg Dual

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.500464

KEYWORDS: Aluminum, Acoustics, Silicon, Thin films, Silicon films, Reflectivity, Picosecond phenomena, Microelectromechanical systems, Reflection, Interfaces

Read Abstract +

Proceedings Article | 3 October 2003 Paper

Ultrasonic wave propagation phenomena at material interfaces of microstructures

Jacqueline Vollmann, Dieter Profunser, Andreas Meier, Juerg Dual, Max Doebeli

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.500535

KEYWORDS: Acoustics, Aluminum, Interfaces, Diffusion, Gold, Wave propagation, Pulsed laser operation, Picosecond phenomena, Reflectivity, Thin films

Read Abstract +

Surfaces as well as interfaces between two neighboring materials are often subjected to various diffusion processes. Such diffusion processes like oxidation or migration of atoms of neighboring materials can cause layers having gradually varying mechanical properties -- like density, Young’s modulus, or shear modulus -- perpendicular to the surface or interface. The growing miniaturization of MEMS devices enlarges the relative size of these layers and thus enhances the importance of phenomena occurring at such material or phase interfaces thus demanding a detailed quantification of its mechanical properties. In this investigation particular interest is drawn on the question how the propagation characteristics of bulk acoustic waves are affected by diffusion layers. The reflection and transmission behavior of bulk acoustic waves encountering a continuum having a spatially dependent sound velocity is discussed based on numerical simulations as well as on experimental verifications. In contrast to previous work done in this field in which diffusion effects are generally considered as undesirable phenomena, the deliberate realization of microstructures having well defined gradually varying material properties in one or more dimensions represents a goal of this investigation. For metallic thin film multi layers thermally induced diffusion processes have shown to be an easy and reliable technique for the realization of layered structures having continuously varying mechanical properties within several 10 nanometers. Among the experimental methods suitable for the in-depth profiling of submicron metallic thin films providing resolutions of several nanometers, are short pulse laser acoustic methods, Rutherford Backscattering Spectroscopy (RBS), and Glow Discharge Optical Emission Spectroscopy (GDOES). Short pulse laser acoustic methods and Rutherford Backscattering Spectroscopy (RBS) have the advantage to be nondestructive. The short pulse laser acoustic method is described in detail and RBS measurements are presented for verification purposes. Finally potential engineering applications like micro-machined spectrum analyzers, acoustic isolation layers, and band pass filters, operating at very high frequencies are presented.

Proceedings Article | 7 June 2002 Paper

Measurement and simulation of the laser-based thermo-elastic excitation and propagation of acoustic pulses for thin film and MEMS inspection

Dieter Profunser, Jacqueline Vollmann, Jurg Bryner, Jurg Dual

Proceedings Volume 4703, (2002) https://doi.org/10.1117/12.469627

KEYWORDS: Acoustics, Thin films, Nondestructive evaluation, Optical simulations, Microelectromechanical systems, Inspection, Photovoltaics, Reflection, Aluminum, Reliability

Read Abstract +

Proceedings Article | 23 October 2001 Paper

Resolution improvement of pulsed laser experiments with a micro-optomechanical focusing tip

Dieter Profunser, Jacqueline Vollmann, Jurg Dual

Proceedings Volume 4400, (2001) https://doi.org/10.1117/12.445592

KEYWORDS: Acoustics, Pulsed laser operation, Wave propagation, Thin films, Temporal resolution, Reflectivity, Ultrasonics, Reflection, Picosecond phenomena, Mechanics

Read Abstract +

Proceedings Article | 23 October 2001 Paper

High-resolution measurement of thin metallic films and multilayers by femtosecond laser pulses

Jacqueline Vollmann, Dieter Profunser, Jurg Dual

Proceedings Volume 4400, (2001) https://doi.org/10.1117/12.445590

KEYWORDS: Acoustics, Reflectivity, Modulation, Aluminum, Laser beam diagnostics, Thin films, Beam splitters, Optical amplifiers, Pulsed laser operation, Metrology

Read Abstract +

Showing 5 of 10 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years