Mr. Ivan Kostic Profile

Ivan Kostic

at Institute of Informatics SAV

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Publications (6)

Proceedings Article | 22 April 2005 Paper

Refractometric investigation and analysis of nano-scaled dispersions

Yanko Sarov, Ivan Kostic, I. Capek, R. Andok, Valentina Sarova, P. Capek, Ivo Rangelow

Proceedings Volume 5830, (2005) https://doi.org/10.1117/12.618699

KEYWORDS: Latex, Particles, Refractive index, Metals, Polymers, Iron, Silver, Light scattering, Ruthenium, Nanoparticles

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Proceedings Article | 4 November 2003 Paper

Automatic laser refractometer

Yanko Sarov, Ivan Kostic, S. Minov, Stefan Mitkov, Georgi Minchev, L. Uher

Proceedings Volume 5226, (2003) https://doi.org/10.1117/12.519486

KEYWORDS: Diffraction gratings, Prisms, Liquids, Diffraction, Resistance, Semiconductor lasers, Prototyping, Temperature metrology, Water, Chromium

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Proceedings Article | 5 June 1998 Paper

Comparative study of resist heating and proximity effect influence on CD variation in 30-kV EBL

Sergey Babin, Peter Hudek, Ivan Kostic, Igor Kuzmin

Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309629

KEYWORDS: Electron beam lithography, Temperature metrology, Lithography, Critical dimension metrology, Beam shaping, Computing systems, Distortion, Photomasks, Photoresist processing, Electron beams

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Proceedings Article | 7 July 1997 Paper

CD variation in 30-kV EBL due to resist heating: experiment and simulation

Sergey Babin, Peter Hudek, Ivan Kostic, Igor Kuzmin

Proceedings Volume 3048, (1997) https://doi.org/10.1117/12.275800

KEYWORDS: Electron beam lithography, Critical dimension metrology, Distortion, Laser scattering, Scattering, Computing systems, Lithography, Electron beams, 3D modeling, Software development

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Proceedings Article | 23 September 1996 Paper

Chemically amplified deep UV resists for micromachining

Peter Hudek, Ivo Rangelow, Ivan Kostic, Piotr Grabiec, Feng Shi

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251206

KEYWORDS: Etching, Silicon, Reactive ion etching, Photoresist processing, Electron beam lithography, Plasma, Plasma etching, Lithography, Photomasks, Deep ultraviolet

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Showing 5 of 6 publications

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