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Chun-Yu Hsu
at National Yang Ming Chiao Tung Univ.
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Publications (1)
Proceedings Article | 6 July 2000 Paper
Optical and thermal properties of SiNx for MO disks
Chih-Huang Lai, Chang-Lin Huang, Chun-Yu Hsu, I-Nan Lin, JwoHuei Jou
Proceedings Volume 4081, (2000) https://doi.org/10.1117/12.390516
KEYWORDS: Sputter deposition, Refractive index, Molybdenum, Magnetism, Dielectrics, Chemical species, Thermography, Optical properties, Silicon, Temperature metrology
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