Dr. Hong Chen
Student at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 April 2014 Paper
Hong Chen, Xinbing Wang, Duluo Zuo, Peixiang Lu, Haihong Zhu, Tao Wu
Proceedings Volume 9048, 90481V (2014) https://doi.org/10.1117/12.2045732
KEYWORDS: Extreme ultraviolet, Plasma, Carbon dioxide lasers, Neodymium, YAG lasers, Tin, Light sources, Extreme ultraviolet lithography, Photodiodes, Spectroscopy

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