Mr. Hitoshi Suzuki Profile

Hitoshi Suzuki

at Topcon Corp

SPIE Involvement:

Author

Publications (7)

SPIE Journal Paper | 1 October 2007

Lens-cementing technology used in optical systems of deep-ultroviolet wavelength regions

Takashi Takahashi, Toshiki Okumura, Etsuya Suzuki, Tatsuya Kojima, Hitoshi Suzuki, Toru Tojo, Koji Machida

JM3, Vol. 6, Issue 04, 043010, (October 2007) https://doi.org/10.1117/12.10.1117/1.2804125

KEYWORDS: Cements, Deep ultraviolet, Adhesives, Transmittance, Objectives, Inspection, Microscopes, Fluorine, Lamps, Excimer lasers

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Proceedings Article | 5 April 2007 Paper

Image quality improvement in inspection systems using double integrator illumination

Akira Takada, Hitoshi Suzuki, Toru Tojo, Masato Shibuya

Proceedings Volume 6518, 65184B (2007) https://doi.org/10.1117/12.711286

KEYWORDS: Inspection, Integrated optics, Photomasks, Image sensors, Defect inspection, Image quality, Imaging systems, Image processing, Lenses, Image acquisition

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Proceedings Article | 24 March 2006 Paper

Lens-cementing technology used in optical system of DUV wavelength region: selection of optical cement and degradation evaluation by DUV irradiation

Takashi Takahashi, Susumu Saito, Toshiki Okumura, Etsuya Suzuki, Tatsuya Kojima, Shinsuke Motomiya, Hidesuke Maruyama, Hitoshi Suzuki, Koji Machida, Toru Tojo

Proceedings Volume 6152, 61523P (2006) https://doi.org/10.1117/12.654700

KEYWORDS: Adhesives, Cements, Transmittance, Deep ultraviolet, Objectives, Microscopes, Inspection, Silica, Excimer lasers, Calcium

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Proceedings Article | 6 December 2004 Paper

Advanced mask inspection optical system (AMOS) using 198.5-nm wavelength for 65-nm (hp) node and beyond: system development and initial state D/D inspection performance

Toru Tojo, Ryoich Hirano, Hideo Tsuchiya, Junji Oaki, Takeshi Nishizaka, Yasushi Sanada, Kazuto Matsuki, Ikunao Isomura, Riki Ogawa, Noboru Kobayashi, Kazuhiro Nakashima, Shinji Sugihara, Hiromu Inoue, Shinichi Imai, Hitoshi Suzuki, Akihiko Sekine, Makoto Taya, Akemi Miwa, Nobuyuki Yoshioka, Katsumi Ohira, Dong-Hoon Chung, Masao Otaki

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.579133

KEYWORDS: Inspection, Photomasks, Sensors, Image sensors, Defect detection, Algorithm development, Speckle, Modulation transfer functions, Image processing, Optical inspection

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Proceedings Article | 24 May 2004 Paper

Three-dimensional measurement by tilting and moving the objective lens in CD-SEM (II)

Kazuo Abe, Kouji Kimura, Yasuko Tsuruga, Shin-ichi Okada, Hitoshi Suzuki, Nobuo Kochi, Hirotami Koike, Akira Hamaguchi, Yuichiro Yamazaki

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536134

KEYWORDS: Objectives, 3D metrology, Image resolution, 3D image processing, Semiconductors, Reconstruction algorithms, 3D image reconstruction, Magnetism, Electron beams, Optical simulations

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Proceedings Article | 2 June 2003 Paper

Three-dimensional measurement by tilting and moving objective lens in CD-SEM

Kouji Kimura, Kazuo Abe, Yasuko Tsuruga, Hitoshi Suzuki, Nobuo Kochi, Hirotami Koike, Yuuichiro Yamazaki

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.483687

KEYWORDS: Objectives, Reconstruction algorithms, Electron beams, 3D image processing, 3D metrology, Algorithm development, Image resolution, Semiconducting wafers, 3D image reconstruction, Semiconductors

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Proceedings Article | 19 July 2000 Paper

Newly developed mask inspection system with DUV laser illumination

Katsuki Oohashi, Hiromu Inoue, Takehiko Nomura, Akira Ono, Mitsuo Tabata, Hitoshi Suzuki

Proceedings Volume 4066, (2000) https://doi.org/10.1117/12.392086

KEYWORDS: Inspection, Photomasks, Phase shifts, Speckle, Deep ultraviolet, Speckle pattern, Sensors, Defect detection, Laser development, Light sources

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Showing 5 of 7 publications

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