Scanning White Light Interferometry (SWLI), now referred to as Coherence Scanning Interferometry (CSI), is established as a powerful tool for sub-nanometer surface metrology. The technique provides accurate and rapid three dimensional topographical analysis without contacting the surface under measurement. This paper will focus on recent developments of CSI using the Helical Complex Field (HCF) function that have extended its use for important thin film measurements. These developments now enable CSI to perform thin film thickness measurements, to measure the surface profile and the interfacial surface roughness of a buried interface and to derive optical constants (index of refraction n and extinction coefficient K).
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.