CONFERENCE PROCEEDINGS
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Hiroaki Tomuro
at Gigaphoton Inc
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Author
Publications (3)
Proceedings Article | 28 April 2023 Poster + Paper
Development progress of key components for LPP-EUV light sources
Proceedings Volume 12494, 1249411 (2023) https://doi.org/10.1117/12.2657640
KEYWORDS: Extreme ultraviolet, Tin, Collector mirrors, Laser irradiation, Light sources, Plasma, Ions, Gas lasers, Hydrogen, Control systems
Proceedings Article | 13 October 2021 Presentation + Paper
Update of >300W high power LPP-EUV source challenge IV for semiconductor HVM
Hakaru Mizoguchi, Hiroaki Tomuro, Yuichi Nishimura, Hirokazu Hosoda, Hiroaki Nakarai, Tamotsu Abe, Hiroshi Tanaka, Yukio Watanabe, Yutaka Shiraishi, Tatsuya Yanagiga, Georg Soumagne, Fumio Iwamoto, Shinji Nagai, Yoshifumi Ueno, Takashi Suganuma, Gouta Niimi, Takayuki Yabu, Tsuyoshi Yamada, Takashi Saitou
Proceedings Volume 11854, 118540K (2021) https://doi.org/10.1117/12.2600714
KEYWORDS: Extreme ultraviolet, Carbon dioxide lasers, Tin, Mirrors, Plasma, Laser systems engineering, Extreme ultraviolet lithography, Light sources, Reflectivity, Laser development
Proceedings Article | 20 September 2020 Presentation
Update of >300W high power LPP-EUV source challenge for semiconductor HVM
Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe, Hiroshi Tanaka, Yukio Watanabe, Tsukasa Hori, Yutaka Shiraishi, Yoshifumi Ueno, Tatsuya Yanagida, Georg Soumagne, Tsuyoshi Yamada, Takashi Saitou, Hirokazu Hosoda, Hiroaki Tomuro, Shinji Nagai, Gouta Niimi, Takashi Suganuma
Proceedings Volume 11517, 115170Q (2020) https://doi.org/10.1117/12.2574707
KEYWORDS: Mirrors, Semiconductors, Extreme ultraviolet, Carbon dioxide lasers, Extreme ultraviolet lithography, Light sources, Magnetism, Magnetic semiconductors, Tin, Pulsed laser operation
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