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Dr. Henryson O. Omoregie
at SCHOTT Lithotec USA Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 5 November 2005 Paper
Mobile metrology for advanced photomask manufacturing
Paul MacDonald, Michael Goudy, Devi Koty, Henryson Omoregie, M. David Webster
Proceedings Volume 5992, 59921J (2005) https://doi.org/10.1117/12.632221
KEYWORDS: Photomasks, Manufacturing, Chromium, Quartz, Sensors, Temperature metrology, Reticles, Metrology, Deposition processes, Semiconducting wafers
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