CONFERENCE PROCEEDINGS
Advanced Search
Heng-Jen Lee
at Photronics DNP Mask Corp
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 26 September 2019 Paper
Characterization of quartz etched depth and optical density of opaque pattern for the wafer CD behavior on advanced mask
William Chou, Jeffrey Cheng, C. Twu, Adder Lee, Chih Hsuan Chao, Xin Ren Yu, Po Tsang Chen, Edgar Huang, Junjin Lin, Sweet Chen, James Cheng, Colbert Lu, Josh Tzeng, Jackie Cheng, Heng Jen Lee, Young Ham
Proceedings Volume 11148, 111481I (2019) https://doi.org/10.1117/12.2537938
KEYWORDS: Quartz, Photomasks, Critical dimension metrology, Semiconducting wafers, 3D metrology, Immersion lithography, Etching, Lithography, Binary data
Proceedings Article | 26 September 2019 Paper
Practical lithography hotspot identification using mask process model
Proceedings Volume 11148, 111481H (2019) https://doi.org/10.1117/12.2537935
KEYWORDS: Lithography, Photomasks, Process modeling, Optical proximity correction, Semiconducting wafers, Machine learning, Resolution enhancement technologies, Source mask optimization, Critical dimension metrology, Computer simulations
Proceedings Article | 27 June 2019 Paper
A study of airborne molecular contamination to Cr etching process
Yuan Hsu, Yutaka Satou, Heng-Jen Lee, Zack Huang
Proceedings Volume 11178, 111780M (2019) https://doi.org/10.1117/12.2530983
KEYWORDS: Contamination, Chromium, Etching, Chlorine, Plasma, Particles, Inspection, Photomasks, Dry etching, Scanning electron microscopy
Proceedings Article | 3 October 2018 Paper
Hotspot analysis and empirical correction through mask and wafer technology harmonization
Yohan Choi, William Chou, Jeffrey Cheng, C. H. Twu, Adder Lee, Chih Hsuan Chao, Hsin Fu Chou, Sweet Chen, James Cheng, Colbert Lu, Josh Tzeng, Jackie Cheng, Hong Jen Lee, Michael Green, Mohamed Ramadan, Young Ham, Chris Progler
Proceedings Volume 10810, 108101K (2018) https://doi.org/10.1117/12.2501427
KEYWORDS: Optical proximity correction, Photomasks, Lithography
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top