Mr. Graham M. Pugh Profile

Graham M. Pugh

Staff Engineer at Intel Corp

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Author

Publications (3)

Proceedings Article | 16 July 2002 Paper

Evaluation of ASML ATHENA alignment system on Intel front-end processes

Graham Pugh, Maria Giorgi

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473468

KEYWORDS: Semiconducting wafers, Optical alignment, Polishing, Scanners, Overlay metrology, Etching, Signal processing, Scanning probe microscopy, Signal detection, Tungsten

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Proceedings Article | 26 May 1995 Paper

Detailed study of a phase shift focus monitor

Graham Pugh, Brian DeWitt, Craig Sager, Patrick Reynolds

Proceedings Volume 2440, (1995) https://doi.org/10.1117/12.209296

KEYWORDS: Semiconducting wafers, Calibration, Image registration, Reticles, Phase shifts, Error analysis, Etching, Structural design, Critical dimension metrology, Manufacturing

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Proceedings Article | 24 June 1993 Paper

Dual exposure (e-beam and i-line) of OCG-895i resist

Richard Bojko, Graham Pugh

Proceedings Volume 1924, (1993) https://doi.org/10.1117/12.146507

KEYWORDS: Semiconducting wafers, Photoresist processing, Etching, Electron beam lithography, Optical alignment, Optical lithography, Lithography, Resistance, Polymethylmethacrylate, HF etching

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