Unspecified Graham Jensen Profile

Graham Jensen

at KLA New York

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Publications (1)

Proceedings Article | 17 November 2021 Presentation + Paper

Exploring the stochastics cliff: understanding the impact of LER/LWR to stochastic defectivity and yield

Jennifer Church, Graham Jensen, Romain Lallement, Andrew Cross, Luciana Meli

Proceedings Volume 11854, 118540X (2021) https://doi.org/10.1117/12.2600877

KEYWORDS: Line edge roughness, Stochastic processes, Inspection, Modulation, Critical dimension metrology, Semiconducting wafers, Plasma, Defect inspection, Optical inspection, Extreme ultraviolet lithography

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