An improved mathematical model in order to study mechanical behavior of an extensible microplate subjected to
nonlinear electrostatic pressure was presented. In this model, the effect of stretching due to fixed boundary conditions
and residual stresses because of fabrication process on static instability of the microplate was studied. The derived
nonlinear partial integro-differential governing equation considering stretching and residual stresses effects, using of
Step-by-Step Linearization Method (SSLM), was linearized. By applying the finite difference method (FDM) to a
rectangular mesh, the linearized equation was discretized. By considering the stretching stresses effect, the present
mathematical model shows a highly reasonable prediction of divergence instability as compared with previous existing
model. The obtained results show that the residual stresses have considerable effects on Pull-in phenomenon. Axial
stresses due to stretching and tensile residual stresses increase pull-in voltage and compressive residual stresses decrease
it.
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