Dr. Francis Fahrni Profile

Dr. Francis Fahrni

at ASML Netherlands BV

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Publications (2)

Proceedings Article | 26 May 2022 Presentation + Paper

On-scanner high-spatial-frequency overlay control using a distortion manipulator

Friso Klinkhamer, Bart Smeets, Theo Thijssen, Francis Fahrni, Wim de Boeij, Mohamed El Kodadi, Thilo Pollak, Wolfgang Emer

Proceedings Volume 12051, 120510K (2022) https://doi.org/10.1117/12.2614031

KEYWORDS: Distortion, Scanners, Overlay metrology, Metrology, Lithography, Interfaces, Spatial frequencies, Semiconducting wafers, Extreme ultraviolet lithography

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Proceedings Article | 23 March 2020 Presentation + Paper

A novel projection lens manipulator for high frequent overlay tuning

Thilo Pollak, Wolfgang Emer, Bernd Thüring, Francis Fahrni, Friso Klinkhamer, Wim de Boeij, Wim Bouman

Proceedings Volume 11327, 113270T (2020) https://doi.org/10.1117/12.2552063

KEYWORDS: Distortion, Spatial frequencies, Semiconducting wafers, Overlay metrology, Scanners, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Immersion lithography, Lithography

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