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Florian Oesterle
at Friedrich-Alexander-Univ Erlangen-Nürnberg
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Publications (1)
Proceedings Article | 17 May 2013 Paper
A large deflection model of silicon membranes for testing intrinsic stress of MEMS microphones by measuring pull-In voltage
Florian Oesterle, Franz Fink, Harald Kuhn, Alfons Dehé, Robert Weigel, Alexander Koelpin
Proceedings Volume 8763, 876326 (2013) https://doi.org/10.1117/12.2016835
KEYWORDS: Capacitance, Electrodes, Microelectromechanical systems, Manufacturing, Silicon, Computer simulations, Fermium, Free electron lasers, Americium, Thin films
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