Industrial ultrafast lasers such as TRUMPF’s TruMicro Series are indispensable tools in many precision machining processes. Large 24/7 applications range from machining of sapphire or glass to ceramics, polymers, and metals in industries from the automotive sector to consumer electronics. In typical installations such pico- and femtosecond lasers currently operate at average power levels up to 150 W, often with nonlinear frequency conversion to the visible or UV. Based on the advanced amplifier technology pioneered by AMPHOS we introduce our new hybrid fiber–InnoSlab amplifier generation TruMicro Series 6000, capable of producing the highest average power at utmost flexibility and reliability.
Ultrafast micromachining has found broad applications in a variety of scientific and industrial fields. Different materials and competing customer requirements (surface quality vs. processing speed vs. surface structure etc.) call for parameter studies prior to volume production as well as pulse parameter flexibility during operation. Up to now, often a nonoptimized point of operation for either best speed or quality had to be chosen due to limited laser source flexibility. TruMicro Series 2000 introduces true inter- and intra-process flexibility for pulse parameters such as pulse duration, pulse energy and pulse spacing up to GHz bursts. As of now, switching the pulse duration is possible within 300 fs and 20 ps in less than 600 ms without affecting beam pointing or energy stability. Therefore, intra-process pulse parameter changes allow maximization of the ablation-volume efficiency in one step and surface-quality optimization in a second, finalizing step. Additionally, inter-process pulse parameter changes enable material changes in between workpieces. In this contribution, we show how this novel flexibility for the first time leads to comprehensive and automated parameter studies that allow for next-generation process understanding and the clear selection of enhanced points of operation. We demonstrate how ablation of various materials can be increased by employing bursts on a nanosecond timescale where a simple increase in fluence would result in cone-like protrusions. Choosing the suitable timescale for energy deposition can either maximize energy efficiency of ablation or optimize ablation quality. With the TruMicro Series 2000, both optima can be combined to one efficient, high-quality process.
We report on TRUMPF´s industrialized hollow-core-fiber laser-light-cable coupled to the TruMicro ultrafast laser platform. A flexible connection between processing head and laser source offers new opportunities in the design of compact laser processing machines. The compact, light-weight connector at the end of the delivery fiber provides a well defined optical interface close to the processing optics, and spatially eases integration of any laser to the machine, enabling optimum access for fast system maintenance without any need for re-alignments. Constant optical beam parameters are ensured even during dynamical movement of the laser-light-cable and the processing head. TRUMPF offers a complete in-house solution consisting of the ultrafast laser platform with up to 10 m long hollow-core-fiber laser-light-cables. The system further includes monitoring devices, e.g. for mode field and power, fiber protection and a safety circuit.
As an application example of this compact laser system we present further progress on glass welding. Ultrashort laser pulses enable local bulk modifications in glass as well as controlled melting via heat accumulation. Improved glass welding using optimized energy modulation of successive laser pulses from our advanced TruMicro Series 2000 platform are discussed. The approach for joining brittle materials provides long-term stable and gas-tight joints.
Within the last ten years, ultrashort pulsed lasers have developed from complex scientific devices to reliable industrial tools for various applications. MOPA systems with fiber amplifiers offer an excellent combination of small size, reliable design and flexible parameters. However, their power and more specifically pulse energy levels could not reach the high level of other laser designs based on disk or rod amplifiers.
In the latest development generation of TRUMPF’s TruMicro 2000 series, we present an all-fiber ultrashort pulse laser with a maximum pulse energy of 100 µJ based on industrial grade technologies. The high energy level allows for efficient frequency conversion to a wavelength of 515 nm which is beneficial for numerous applications.
Furthermore, the linear amplifier concept combined with intelligent electronics and software allow for flexible adaption of parameters: The laser is equipped with a sophisticated pulse-on-demand function that allows variable pulse picking from the seed frequency of 50 MHz. This bears the challenge of fluctuating pulse ensures which is overcome by a combination of measures that ensure constant pulse energies even with variable pulse distances. As a result, the laser pulses can be synchronized to external trigger signals with a time jitter as low as 30 ns.
Additionally, the TruMicro 2000 offers a flexible burst mode up to 8 pulses in one burst and the pulse duration can be changed continuously from femto- to picoseconds. With a newly patented technology, the full sweep from 300 fs to 20 ps is done in less than 500 ms without any influence on beam parameters.
The world market for laser micro-processing has seen a tremendous increase within the last 24 months triggered predominantly by large scale projects in the electronics industry. By far the largest contribution to this growth came from UV nano- and picosecond lasers for various applications for manufacturing consumer electronics devices.
The process chain of flexible OLED display used in smart devices (phones, watches, tablets) is heavily relying on ultraviolet lasers: Debonding of the large display foils (typically 1500 x 1850 mm²) from the carrier glass they are produced on is a critical process since it is one of the last steps in the process chain at the peak of the added value. UV nanosecond lasers enable reliable debonding (laser lift-off) without risking any damage to the displays.
Subsequently, the display cells are singulated by laser cutting. Also this process step relies heavily on UV lasers, but in this case with ultrashort pulses. The combination of ultrashort pulse duration and short wavelength allows efficient and precise cutting of these multi-layer materials without unwanted heat affected zones or even thermal damage to the electronics in the display. Various additional parts that are integrated in smart devices like polarizer foils and flexible printed circuit boards are based on multi-material foils and are cut to their net shape with UV nanosecond or ultrashort pulsed lasers.
In this contribution we present an overview of the different UV laser processes and compare the process results from ns, ps and fs lasers to give an outlook on future applications.
Based on the thin-disk laser architecture, TRUMPF has been developing and building high-power cw lasers for over two decades. The short pulse thin-disk lasers of the TruMicro 7000 series are employed in a wide range of industrial applications as well. With different wavelengths and pulse energies, the TruMicro 7000 series enables processes like cutting, structuring, and ablation of many materials.
Recently, TRUMPF introduced short pulsed UV lasers based on a disk laser medium for applications requiring high average powers in combination with nanosecond pulse lengths. With 180 W of average output power the TruMicro 7370 combines the highest average power of a solid-state laser with UV output and pulse energies of 18 mJ. With the solid-state platform, the lifetime is significantly increased compared to excimer lasers typically used for high power UV nanosecond applications.
Here, we present the latest development of this laser platform allowing for an increase of the laser power up to 400 W and the pulse energy to 40 mJ employing a cascading scheme for third-harmonic generation. By accessing TRUMPF’s elaborated disk-laser expertise, the new UV nanosecond laser TruMicro 7380 also provides enhanced pulse energy stability.
All these benefits of these short-pulse solid-state UV laser are predestining this platform for large-area applications as e. g. laser-lift-off of flexible OLED displays where average power and pulse energy can be translated into productivity by means of line-beam optics. The possibility of synchronizing up to twelve of these laser devices allows for even higher productivities.
In this work we present an ultrafast laser system distinguished by its industry-ready reliability and its outstanding flexibility that allows for real-time process-inherent parameter. The robust system design and linear amplifier architecture make the all-fiber series TruMicro 2000 ideally suited for passive coupling to hollow-core delivery fibers. In addition to details on the laser system itself, various application examples are shown, including welding of different glasses and ablation of silicon carbide and silicon.
We report on TRUMPF´s ultrafast laser systems equipped with industrialized hollow core fiber laser light cables. Beam guidance in general by means of optical fibers, e.g. for multi kilowatt cw laser systems, has become an integral part of laser-based material processing. One advantage of fiber delivery, among others, is the mechanical separation between laser and processing head. An equally important benefit is given by the fact that the fiber end acts as an opto-mechanical fix-point close to successive optical elements in the processing head. Components like lenses, diffractive optical elements etc. can thus be designed towards higher efficiency which results in better material processing. These aspects gain increasing significance when the laser system operates in fundamental mode which is usually the case for ultrafast lasers. Through the last years beam guidance of ultrafast laser pulses by means of hollow core fiber technology established very rapidly. The combination of TRUMPF´s long-term stable ultrafast laser sources, passive fiber coupling, connector and packaging forms a flexible and powerful system for laser based material processing well suited for an industrial environment. In this article we demonstrate common material processing applications with ultrafast lasers realized with TRUMPF´s hollow core fiber delivery. The experimental results are contrasted and evaluated against conventional free space propagation in order to illustrate the performance of flexible ultrafast beam delivery.
The matchless properties of ultrashort laser pulses, such as the enabling of cold processing and non-linear absorption, pave the way to numerous novel applications. Ultrafast lasers arrived in the last decade at a level of reliability suitable for the industrial environment.1 Within the next years many industrial manufacturing processes in several markets will be replaced by laser-based processes due to their well-known benefits: These are non-contact wear-free processing, higher process accuracy or an increase of processing speed and often improved economic efficiency compared to conventional processes. Furthermore, new processes will arise with novel sources, addressing previously unsolved challenges. One technical requirement for these exciting new applications will be to optimize the large number of available parameters to the requirements of the application.
In this work we present an ultrafast laser system distinguished by its capability to combine high flexibility and real time process-inherent adjustments of the parameters with industry-ready reliability. This industry-ready reliability is ensured by a long experience in designing and building ultrashort-pulse lasers in combination with rigorous optimization of the mechanical construction, optical components and the entire laser head for continuous performance. By introducing a new generation of mechanical design in the last few years, TRUMPF enabled its ultrashort-laser platforms to fulfill the very demanding requirements for passively coupling high-energy single-mode radiation into a hollow-core transport fiber. The laser architecture presented here is based on the all fiber MOPA (master oscillator power amplifier) CPA (chirped pulse amplification) technology. The pulses are generated in a high repetition rate mode-locked fiber oscillator also enabling flexible pulse bursts (groups of multiple pulses) with 20 ns intra-burst pulse separation. An external acousto-optic modulator (XAOM) enables linearization and multi-level quad-loop stabilization of the output power of the laser.2 In addition to the well-established platform latest developments addressed single-pulse energies up to 50 μJ and made femtosecond pulse durations available for the TruMicro Series 2000.
Beyond these stabilization aspects this laser architecture together with other optical modules and combined with smart laser control software enables process-driven adjustments of the parameters (e. g. repetition rate, multi-pulse functionalities, pulse energy, pulse duration) by external signals, which will be presented in this work.
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