Dr. Fabian Meder Profile

Dr. Fabian Meder

at Istituto Italiano di Tecnologia

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 5 March 2021 Presentation + Paper

Two-step MEMS microfabrication via 3D direct laser lithography

Omar Tricinci, Marco Carlotti, Andrea Desii, Fabian Meder, Virgilio Mattoli

Proceedings Volume 11696, 116960J (2021) https://doi.org/10.1117/12.2579213

KEYWORDS: Microfabrication, Lithography, Microelectromechanical systems, Fabrication, Spatial resolution, Resonators, Photonics, Metals, Medicine, Materials processing

Read Abstract +

Micro/nano electro-mechanical systems (MEMS/NEMS) are constantly attracting an increasing attention for their relevant technological applications in fields ranging from biology, medicine, ecology, energy to industry. Most of the performances of micro-nanostructured devices rely on both the design and the intrinsic properties of the constituent materials that are processed at such dimensional scale. For this reason, spatial precision, resolution and reproducibility are crucial factors in the micro-fabrication procedure. 3D direct laser lithography (DLL), based on multiphoton absorption, allows to realize outstanding three-dimensional structures with nanoscale features. This technique has recently emerged as a powerful tool for fabricating 3D micro-patterned surfaces for optics, photonics, as well as for bioinspired cell culture scaffold. We propose a method for a two-step fabrication of micro/nanostructured multicomponent systems to be employed as transductors, by means of the integration of 3D DLL and shadowing effects in metal deposition. A z-axis accelerometer is the proof-of-concept for the validation of the proposed transductor. The former is composed of a cantilever patterned with conductive paths which act as a strain gauge. Mechanical stimulation deforms the cantilever and, accordingly, varies its conductive properties. The fabrication of the conductive components is performed using the vacuum evaporation of gold, a traditional microfabrication technique, and exploiting the shadowing effect due to peculiar microstructures on the cantilever.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years