Mr. Ernesto Lopez Profile

Ernesto Lopez

Applications Engineer at nanotools USA LLC

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Publications (1)

SPIE Journal Paper | 28 March 2020

Wear comparison of critical dimension-atomic force microscopy tips

Ndubuisi Orji, Ronald Dixson, Ernesto Lopez, Bernd Irmer

JM3, Vol. 19, Issue 01, 014004, (March 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.1.014004

KEYWORDS: Silicon, Atomic force microscopy, Microscopy, Calibration, Electron beams, Critical dimension metrology, Transmission electron microscopy, Metrology, Scanning electron microscopy, Standards development

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