Dr. Dmitriy S. S. Verkhoturov Profile

Dr. Dmitriy S. S. Verkhoturov

at Texas A&M Univ

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation

Nanoscale molecular analysis with nano-projectile SIMS

Michael Eller, Brandon Holybee, Dmitriy Verkhoturov, Michael Shaw, Stanislav Verkhoturov, Blake Bluestein, Morgan Hazelbaker, Carly Rogan, Serge Della-Negra, James Blackwell, Emile Schweikert

Proceedings Volume 12955, 1295509 (2024) https://doi.org/10.1117/12.3011750

KEYWORDS: Silicon, Ions, Extreme ultraviolet, Chemical analysis, Ultraviolet radiation, Spectroscopy, Semiconductors, Photoacid generators, Photo decomposable quencher, Mass spectrometry

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SPIE Journal Paper | 7 November 2022

Evaluating nanoscale molecular homogeneity in extreme ultraviolet resists with nanoprojectile secondary ion mass spectrometry

Jander Cruz, Stanislav Verkhoturov, Dmitriy Verkhoturov, Michael Robinson, James Blackwell, Michael Eller, Emile Schweikert

JM3, Vol. 21, Issue 04, 044001, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.044001

KEYWORDS: Ions, Extreme ultraviolet, Polymers, Photoresist processing, Mass spectrometry, Stochastic processes, Diffusion, Molecular spectroscopy, Quenching (fluorescence), Gold

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Proceedings Article | 25 May 2022 Paper

Evaluating nanoscale molecular homogeneity in EUV resists with nano-projectile SIMS

Jander Cruz, Michael Eller, Stanislav Verkhoturov, Dmitriy Verkhoturov, Michael Robinson, James Blackwell, Emile Schweikert

Proceedings Volume 12055, 120550I (2022) https://doi.org/10.1117/12.2614059

KEYWORDS: Ions, Polymers, Extreme ultraviolet, Extreme ultraviolet lithography, Diffusion, Stochastic processes, Mass spectrometry

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