Mr. Darryl A. Keenan Profile

Darryl A. Keenan

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Publications (1)

Proceedings Article | 26 June 2003 Paper

193-nm detector nonlinearity measurement system at NIST

Shao Yang, Darryl Keenan, Holger Laabs, Marla Dowell

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485343

KEYWORDS: Sensors, Calibration, Excimer lasers, Attenuators, Laser development, Pulsed laser operation, Laser energy, Beam splitters, Signal detection, Beam homogenizers

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