Dr. Daniel R. Ward
at Sandia National Labs
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 6 March 2021 Open Access
JM3, Vol. 20, Issue 01, 014901, (March 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.1.014901
KEYWORDS: Hydrogen, Silicon, Scanning tunneling microscopy, Optical lithography, Temperature metrology, Lithography, Pulsed laser operation, Semiconductor lasers, Manufacturing, Microelectronics

Proceedings Article | 23 March 2020 Presentation + Paper
A. Katzenmeyer, S. Dmitrovic, A. Baczewski, E. Bussmann, T.-M. Lu, E. Anderson, S. Schmucker, J. Ivie, D. Campbell, D. Ward, G. Wang, S. Misra
Proceedings Volume 11324, 113240Z (2020) https://doi.org/10.1117/12.2551455
KEYWORDS: Hydrogen, Silicon, Scanning tunneling microscopy, Pulsed laser operation, Optical lithography, Manufacturing, Lithography, Phosphorus, Absorption

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