CONFERENCE PROCEEDINGS
Advanced Search
Dr. Daniel J. Cavicchio
at Block Engineering LLC
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 8 February 2008 Paper
A novel method of creating a surface micromachined 3D optical assembly for MEMS-based miniaturized FTIR spectrometers
D. Reyes, E. Schildkraut, J. Kim, R. Connors, P. Kotidis, D. Cavicchio
Proceedings Volume 6888, 68880D (2008) https://doi.org/10.1117/12.764006
KEYWORDS: Microelectromechanical systems, FT-IR spectroscopy, Michelson interferometers, Spectrometers, Mirrors, Interferometers, Modulation, Optics manufacturing, Scanning electron microscopy, Photomicroscopy
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top