Dr. Chun Guan
Senior Staff Engineer at KLA Corp
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | 1 September 2008
OE, Vol. 47, Issue 09, 097203, (September 2008) https://doi.org/10.1117/12.10.1117/1.2981559
KEYWORDS: Composites, Cameras, Projection systems, Image processing, 3D modeling, 3D image reconstruction, Modulation, Laser imaging, 3D image processing, Demodulation

Proceedings Article | 19 May 2008 Paper
Arosha Goonesekera, Heiko Schmalfuss, Isaac Lee, Chun Guan, Aditya Dayal, Thomas Schulmeyer, Jan Heumann
Proceedings Volume 7028, 70282L (2008) https://doi.org/10.1117/12.793091
KEYWORDS: Inspection, Reticles, Critical dimension metrology, Sensors, Defect detection, Photomasks, Detection and tracking algorithms, Opacity, Resolution enhancement technologies, Image processing

Proceedings Article | 19 May 2005 Paper
Proceedings Volume 5798, (2005) https://doi.org/10.1117/12.603808
KEYWORDS: Composites, Cameras, Projection systems, Computer programming, 3D modeling, Reconstruction algorithms, Picosecond phenomena, 3D image processing, 3D image reconstruction, Structured light

Proceedings Article | 22 October 2004 Paper
Proceedings Volume 5557, (2004) https://doi.org/10.1117/12.560260
KEYWORDS: Composites, Cameras, Image processing, Computer programming, Eye, Modulation, Image filtering, 3D image processing, Optical signal processing, Structured light

Proceedings Article | 14 August 2003 Paper
Proceedings Volume 5097, (2003) https://doi.org/10.1117/12.487276
KEYWORDS: 3D acquisition, Composites, Cameras, Human-computer interaction, Modulation, Video, Acquisition tracking and pointing, Human-machine interfaces, Projection systems, Structured light

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