CONFERENCE PROCEEDINGS
Advanced Search
Charles McFee
SPIE Involvement:
Author
Area of Expertise:
optics , metrology , Xray detectors , automation , instrumentation , imaging
Publications (3)
Proceedings Article | 6 August 2014 Paper
Novel MRF fluid for ultra-low roughness optical surfaces
Proceedings Volume 9281, 928109 (2014) https://doi.org/10.1117/12.2068354
KEYWORDS: Polishing, Magnetorheological finishing, Extreme ultraviolet, Surface finishing, Silica, Chemical mechanical planarization, Aspheric lenses, Microfluidics, Atomic force microscopy, Nickel
Proceedings Article | 23 September 2013 Paper
Ultra-low roughness magneto-rheological finishing for EUV mask substrates
Paul Dumas, Richard Jenkins, Chuck McFee, Arun Kadaksham, Dave Balachandran, Ranganath Teki
Proceedings Volume 8880, 888005 (2013) https://doi.org/10.1117/12.2026372
KEYWORDS: Polishing, Magnetorheological finishing, Extreme ultraviolet, Surface finishing, Chemical mechanical planarization, Particles, Photomasks, Surface roughness, Extreme ultraviolet lithography, Inspection
Proceedings Article | 16 October 2012 Paper
Asphere metrology using variable optical null technology
Proceedings Volume 8416, 841604 (2012) https://doi.org/10.1117/12.2009289
KEYWORDS: Aspheric lenses, Aspheric optics, Optical spheres, Wavefronts, Interferometers, Monochromatic aberrations, Optics manufacturing, Interferometry, Prisms, Calibration
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top