Mr. Christopher J. Goetz Profile

Christopher J. Goetz

Development Analyst at Photronics Inc

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Publications (1)

Proceedings Article | 8 December 1995 Paper

Evaluation of thin PBS resist films for improved feature linearity

Larry Davis, Christopher Goetz, Larry Watson

Proceedings Volume 2621, (1995) https://doi.org/10.1117/12.228186

KEYWORDS: Photomasks, Manufacturing, Opacity, Photoresist processing, Image processing, Thin films, Electron beams, Semiconducting wafers, Reticles, Lithography

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