Dr. Chinchao Liu Profile

Dr. Chinchao Liu

Senior Application Engineer at Greene Tweed & Co Pte Ltd

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Publications (1)

Proceedings Article | 17 March 2015 Paper

Characterization of the effect of etch process operating environment on the perfluoroelastomer chamber seal systems

Chinchao Liu, Gary Reichl

Proceedings Volume 9428, 94280Y (2015) https://doi.org/10.1117/12.2087324

KEYWORDS: Etching, Semiconductors, FT-IR spectroscopy, Scanning electron microscopy, Plasma, Confocal microscopy, Resistance, Microscopes, Plasma etching, Dielectrics

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