Changjie Sun
at Shanghai Huali Integrated Circuit Corp.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 May 2022 Presentation + Paper
Peng Wu, Qi Zhu, Jihong Yang, Changjie Sun, Yiming Zhu, Abhishek Vikram, Ye Chen, Guojie Cheng, Hui Wang, Qing Zhang, Wenkui Liao
Proceedings Volume 12052, 1205213 (2022) https://doi.org/10.1117/12.2613403
KEYWORDS: Image processing, Scanning electron microscopy, Semiconducting wafers, Image analysis, Image classification, Machine learning, Image enhancement, Optical lithography

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