Mr. Chang Won Jung Profile

Chang Won Jung

PhD Student at Univ of California Irvine

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 29 July 2004 Paper

Chang won Jung, Bahram Ghodsian, Bedri Cetiner, Franco De Flaviis

Proceedings Volume 5389, (2004) https://doi.org/10.1117/12.540227

KEYWORDS: Copper, Switches, Oxides, Dielectrics, Silicon, Capacitance, Microelectromechanical systems, Electrodes, Photoresist materials, Oxygen

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Keywords/Phrases