Mr. Beom-Jun Jeon Profile

Beom-Jun Jeon

at Hanyang Univ

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Publications (1)

Proceedings Article | 20 September 2020 Poster

Thermal deformation of EUV mask according to mask type and pattern density

Chung-Hyun Ban, In-Hwa Kang, Beom-Jun Jeon, Won-young Choi, Hye-Keun Oh

Proceedings Volume 11517, 115171C (2020) https://doi.org/10.1117/12.2573149

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Multilayers, Light sources, Finite element methods, Reflectivity, Thermal effects, Pellicles, Semiconducting wafers, Computer simulations

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