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Dr. Benny Lin
at Applied Materials
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Author
Publications (1)
Proceedings Article | 8 November 2012 Paper
Hotspot classification based on higher-order local autocorrelation
Bin Lin, Zheng Shi, Ye Chen
Proceedings Volume 8522, 85222O (2012) https://doi.org/10.1117/12.964384
KEYWORDS: Principal component analysis, Image classification, Binary data, Feature extraction, Vector spaces, Dimension reduction, Optical proximity correction, Photomasks, Semiconducting wafers, Wafer inspection
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