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Ashok Kumar Pandey
at Indian Institute of Science
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Publications (1)
Proceedings Article | 22 February 2008 Paper
Compact modeling of inertial and rarefaction effects on quality factor of MEMS torsional structures in continuum to molecular flows under low operating frequencies
Rudra Pratap, Ashok Kumar Pandey
Proceedings Volume 6885, 68850D (2008) https://doi.org/10.1117/12.769137
KEYWORDS: Microelectromechanical systems, Mirrors, Motion models, Error analysis, Motion analysis, Systems modeling, Instrument modeling, Mechanical engineering, Gyroscopes, Transducers
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