Andrej Keksel
at Rheinland-Pfälzische Technische Univ. Kaiserslautern-Landau
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 August 2023 Presentation + Paper
Proceedings Volume 12618, 126180S (2023) https://doi.org/10.1117/12.2673664
KEYWORDS: Optical coherence tomography, Refractive index, Coating thickness, Film thickness, Coating, Interferometry

Proceedings Article | 5 March 2022 Presentation
Proceedings Volume PC12012, PC120120M (2022) https://doi.org/10.1117/12.2607238
KEYWORDS: Lithography, Multiphoton lithography, Point spread functions, Machine learning, Artificial intelligence, Aberration correction, Testing and analysis, Measurement devices, Evolutionary algorithms, Calibration

Proceedings Article | 20 June 2021 Presentation + Paper
Proceedings Volume 11782, 117820M (2021) https://doi.org/10.1117/12.2591935

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