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Alice Caplier
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Publications (1)
Proceedings Article | 5 October 2023 Paper
Training dataset optimization for deep learning applied to optical proximity correction on non-regular hole masks
Mathis Urard, Clément Paquet, Charlotte Beylier, Jean-Noël Pena, Alice Caplier, Mauro Dalla Mura, Romain Bange, Roberto Guizzetti
Proceedings Volume 12802, 128020A (2023) https://doi.org/10.1117/12.2675612
KEYWORDS: Education and training, Machine learning, Optical proximity correction, Design and modelling, Databases, Photomasks, Source mask optimization, Lithography, Data modeling, Deep learning
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