To increase the cost-effectiveness of the piezostack deformable mirror we proposed to use the modular design of such wavefront correctors. Each module contains 5 individual multilayer actuators with size of 4*4 mm. The performance of 50*50 mm cartridge-type piezostack deformable mirror with 100 control elements was investigated. Main parameters of the developed wavefront corrector were estimated such as the local stroke, influence functions, the control bandwidth.
The reduction of cross-sectional area of actuators from 4*4 mm2 to 2*2 mm2 in cartridge-type piezostack deformable mirror was investigated. Harmonic analysis showed that stroke of the actuators with 16 mm2 and 4 mm2 was equal 5.33 and 5.52 microns correspondingly in case of interdigital commutation of layers. However, the mechanical stiffness of such actuators was low. To increase robustness of wavefront corrector a gap structure for inner electrode configuration was used. The piezoceramic cartridges with cross-sectional area of individual actuator with 2*2 mm2 was produced. The local stroke of single piezostack was 4.6-4.8 microns per 300 V.
For laser beam control in different scientific and industrial tasks adaptive optics tools are widely exploited. Any adaptive optical system parameters are mainly determined by wavefront corrector properties such as stroke, operating speed, resolution of control elements, accuracy performances. Stack-array deformable mirror wavefront corrector made of multilayer piezoceramic combs is proposed as low-cost and reliable alternative to conventional ones. Such design allows to increase spatial resolution and first resonant frequency. Moreover, proposed deformable mirrors will be distinguished by high cost-effectiveness that is key parameter for this type of wavefront correctors.
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