Mr. Albert L. Ihochi Profile

Albert L. Ihochi

Senior Process Engineer at Intel Corp

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 24 May 2004 Paper

Improvement of aluminum interconnect overlay measurement capability through metrology and hardmask process development

Albert Ihochi, Matthew Ross

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.544229

KEYWORDS: Overlay metrology, Metals, Semiconducting wafers, Signal to noise ratio, Metrology, Aluminum, Data modeling, Photoresist materials, Image registration, Optical lithography

Read Abstract +

Proceedings Article | 16 July 2002 Paper

Overlay registration target design for wafer-induced shift characterization

Albert Ihochi, Alan Wong

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473513

KEYWORDS: Metals, Semiconducting wafers, Etching, Chemical mechanical planarization, Overlay metrology, Aluminum, Chemical analysis, Deposition processes, Tungsten, Diffractive optical elements

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years