X-ray computed laminographic tomography (CLT) is a viable tool for creating high-throughput volumetric imaging of large, planar samples. In this work, we present a self-supervised deep image restoration workflow to produce noise-free, artifact-free volumetric reconstructions for laminographic tomography. We demonstrate our CLT method on a variety of samples scanned with an in-house prototype system, showing that our proposed method notably outperforms classic reconstruction methods, that has the potential for more accurate detection of defects and estimation of critical dimensions, thereby providing a feasible solution for rapid inline inspection and failure analysis in advanced integrated circuits packaging.
In this contribution, we present a technique for the determination of optical aberrations, which is based on measurements of the point spread function and a Bayesian optimization of rigorous simulations. The measuring system is a UV-microscope in a reflected light configuration with a 200x magnification, unpolarized light, and an illumination and imaging NA of 0.44 and 0.55, respectively. The PSF is measured by imaging a small quadratic chrome dot (side length ≈ 180 nm) on a glass substrate. We investigate the impact of different adjustment states, different dot locations and different optical microscopes.
KEYWORDS: Nanostructures, Electron microscopy, Scattering, Diffraction limit, Diffraction, Optical microscopy, Near field optics, Near field, Multilayers, Modeling
Dimensional optical microscopy allows for the rapid inspection of devices at the cost of limited accuracy. Introducing a model-based approach that includes diffraction effects allows for increased accuracies. The model needs to be efficient and accurate to evaluate the measurements in an acceptable time frame.
We present an overview of the illumination model and different incidence-pupil sampling techniques. Furthermore, we will demonstrate strategies for efficiently calculating the near-field scattering response from structures using the finite element method.
Using these aspects, we demonstrate a significant increase in the accuracy of dimensional estimates for a range of structures.
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