Mr. Akira Nishiya Profile

Akira Nishiya

Senior Supervisor at Tokyo Electron Kyushu Ltd

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Publications (2)

Proceedings Article | 12 June 2003 Paper

Novel development method to improve critical dimensional control

Akira Nishiya, Kazuo Sakamoto

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485059

KEYWORDS: Standards development, Critical dimension metrology, Semiconducting wafers, Scanning electron microscopy, Semiconductor manufacturing, Semiconductors, Manufacturing, Photoresist processing, Electroluminescence, Image processing

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Proceedings Article | 24 July 2002 Paper

Novel development method for CD control: optimized spin-off development method

Kazuo Sakamoto, Akira Nishiya, Kentarou Yamamura, Takahisa Otsuka

Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474279

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Cadmium, Diffusion, Liquids, Optical lithography, Deep ultraviolet, Lead

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