Dr. Adrian Utama
at A*STAR Institute of Materials Research and Engineering
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 11 March 2024 Presentation + Paper
Simon C. Goh, Adrian Utama, Haitao Yu, Yan Zhou, Mishra Dileep Kumar, Clarence Liu, Morteza Ahmadi, Victor Leong, Manas Mukherjee, King-Jien Chui, Hongyu Li
Proceedings Volume 12892, 128920E (2024) https://doi.org/10.1117/12.3001329
KEYWORDS: Waveguides, Wave propagation, Silicon nitride, Chemical mechanical planarization, Surface roughness, Oxides, Ions, Semiconducting wafers, Etching, Quantum communications

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top