Fabrication of micropyramid structure by fly-cutting

Yuetian Huang; Shijie Li; Bin Fan; Yongjian Wan; Shibin Wu; Jin Zhang; Haifeng Liang; Shaobo Ge

doi:10.1117/1.OE.58.1.013107

30 January 2019 Fabrication of micropyramid structure by fly-cutting

Yuetian Huang, Shijie Li, Bin Fan, Yongjian Wan, Shibin Wu, Jin Zhang, Haifeng Liang, Shaobo Ge

Author Affiliations +

Optical Engineering, Vol. 58, Issue 1, 013107 (January 2019). https://doi.org/10.1117/1.OE.58.1.013107

Abstract

Microgroove cutting by fly-cutting is studied to obtain the optimized parameters to get a smooth groove with less burr and chip. We analyzed the reason for the second groove and reduced the cutting times to fade the effect of machine reposition error. Introducing additional empty cut further reduced the burr and chip. To get the ideal micropyramid arrays, all factors must be considered and controlled. Finally, processed pyramid arrays with the depth of 1 μm whose structure distributed the entire surface evenly and with no obvious chip.

Citation Download Citation

Yuetian Huang, Shijie Li, Bin Fan, Yongjian Wan, Shibin Wu, Jin Zhang, Haifeng Liang, and Shaobo Ge "Fabrication of micropyramid structure by fly-cutting," Optical Engineering 58(1), 013107 (30 January 2019). https://doi.org/10.1117/1.OE.58.1.013107

Received: 4 November 2018; Accepted: 18 December 2018; Published: 30 January 2019

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available